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Covers the conference that is focused on the advances and technologies in semiconductor processing before, during and after ion implantation. This title includes content that encompasses fundamental physical understanding, common and novel applications as
Title: ION Implantation Technology
Author: Seebauer, Edmund G. (EDT)/ Felch, Susan B. (EDT)/ Jain, Amitabh (EDT)/ Kondratenko, Y. V. (EDT)
Publisher: Springer Verlag
Publication Date: 2009/01/01
Number of Pages: 556
Binding Type: HARDCOVER
Library of Congress: 2008937900
BRAND : Seebauer, Edmund G. (EDT)/ Felch, Susan B. (EDT)/ Jain, Amitabh (EDT)/ Kondratenko, Y. V. (EDT)
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